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Kurt Petersen (inventor) : ウィキペディア英語版 | Kurt Petersen (inventor)
Kurt E. Petersen (born February 13, 1948) is an American inventor and entrepreneur, a member of the United States National Academy of Engineering. He is known primarily for his work on microelectromechanical systems.
==Biography== Petersen received his BS degree cum laude in Electrical Engineering from The University of California at Berkeley in 1970. In 1975, he received a PhD degree in EE from the Massachusetts Institute of Technology. He established a micromachining research group at IBM from 1975 to 1982, during which he wrote the review paper “Silicon as a Mechanical Material,” published in the ''IEEE Proceedings'' (May 1982). This paper is a highly referenced work in the field of micromachining and micro-electro-mechanical systems (MEMS); as of September 2014, Google Scholar reported 3087 citations.〔https://www.google.com/search?q=google+scholar&ie=utf-8&oe=utf-8&aq=t&rls=org.mozilla:en-US:official&client=firefox-a&channel=fflb#channel=fflb&q=silicon+as+a+mechanical+material&rls=org.mozilla:en-US:official〕
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